MEMS Flow Sensor-MSH01
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Key words:
MEMS flow sensor
Product Details
Product Description:
The flow sensor is based on the principle of heat conduction. The sensor structure consists of a micro heat source located on the sensitive film, an upstream temperature sensor and a downstream temperature sensor symmetrical to the micro heat source, and an ambient temperature sensor located on the silicon substrate. When there is no fluid flow on the sensor surface, the temperature field around the micro heat source is symmetrically distributed, such as (a); When there is fluid flow on the sensor surface, the temperature field around the micro heat source is disturbed due to the cooling effect of the fluid on the micro heat source, and the upstream and downstream of the micro heat source are asymmetrically distributed, as shown in Figure (B), the greater the asymmetry of the temperature around the micro heat source. The flow rate of the fluid is obtained by the temperature difference between the upstream and downstream temperature sensors.
- Wide Span Ratio> 300:1
- Fast response <5ms
- Ultra-low startup flow <0.05 m/s
- High Sensitivity High Accuracy Above +/-3% Reading Accuracy
- Non-movable parts, high reliability
- Suitable for clean gases and liquids
- Medical respiratory and diagnostic equipment
- Fuel Cell Control
- Automobile air flow meter
- Domestic gas equipment
- Gas and liquid chromatography mass spectrometer
- HVAC
- Leak detector
- Industrial Automation
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